Inventor
Thomas Kemen
Inventor
Aalen, DE
Overview
Patents· 26 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps65%
B82YSpecific uses or applications of nanostructures20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
PatentTitleYear
11,087,948Multi-beam charged particle system202110,784,070Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device202010,741,355Multi-beam charged particle system202010,600,613Particle beam system202010,541,112Charged particle beam system and method of operating the same202010,504,681Particle-optical systems and arrangements and particle-optical components for such systems and arrangements201910,354,831Charged particle inspection method and charged particle system201910,147,582Particle beam system201810,121,635Charged particle beam system and method of operating the same20189,991,089Particle beam system and method for operating a particle optical unit20189,799,485'Particle beam system and method for operating a particle optical unit'20179,673,024'Particle-optical systems and arrangements and particle-optical components for such systems and arrangements'20179,653,254'Particle-optical systems and arrangements and particle-optical components for such systems and arrangements'20179,552,957'Particle beam system'20179,530,613'Focusing a charged particle system'20169,384,938'Particle-optical systems and arrangements and particle-optical components for such systems and arrangements'20169,349,571'Particle optical system'20169,324,537'Charged particle inspection method and charged particle system'20169,263,233'Charged particle multi-beam inspection system and method of operating the same'20169,224,576'Particle-optical systems and arrangements and particle-optical components for such systems and arrangements'20159,099,282'Focusing a charged particle imaging system'20158,637,834'Particle-optical systems and arrangements and particle-optical components for such systems and arrangements'20148,598,525'Particle beam system'20138,097,847'Particle-optical systems and arrangements and particle-optical components for such systems and arrangements'20128,039,813'Charged particle-optical systems, methods and components'20117,554,094'Particle-optical systems and arrangements and particle-optical components for such systems and arrangements'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2018Based in Aalen, DE· patent location history
2011–2020Patents assigned to APPLIED MATERIALS ISRAEL LTD (14)· patent assignee history
2012–2016Patents assigned to KEMEN THOMAS (5)· patent assignee history
2012–2016Patents assigned to CASARES ANTONIO (3)· patent assignee history
2013–2020Patents assigned to ZEISS CARL MICROSCOPY GMBH (20)· patent assignee history
2018–2021Based in Meppen, DE· patent location history
2020–2021Patents assigned to CARL ZEISS MULTISEM GMBH (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL MICROSCOPY GMBH | 20 | 2013–2020 |
| APPLIED MATERIALS ISRAEL LTD | 14 | 2011–2020 |
| KEMEN THOMASself | 5 | 2012–2016 |
| CASARES ANTONIO | 3 | 2012–2016 |
| CARL ZEISS MULTISEM GMBH | 2 | 2020–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 18 | 2009–2018 |
| Meppen, DE | 8 | 2018–2021 |