Inventor
Katsuhito Nishikawa
Inventor
San Jose, CA, US
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
C30BSingle-crystal growth20%
H05BElectric heating11%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests9%
F16CShafts4%
Y10TTechnical subjects covered by former us classification4%
B01DSeparation2%
F27BFurnaces, kilns, ovens or retorts in general2%
H01LSemiconductor devices2%
PatentTitleYear
8,610,033'Rapid thermal process reactor utilizing a low profile dome'20137,794,667'Gas ring and method of processing substrates'20106,592,675'Rotating susceptor'20036,491,435'Linear robot'20026,475,284'Gas dispersion head'20026,443,618'Particulate free air bearing and seal'20026,428,609'Exhaust particulate controller and method'20026,347,749'Semiconductor processing reactor controllable gas jet assembly'20026,328,221'Method for controlling a gas injector in a semiconductor processing reactor'20016,310,327'Rapid thermal processing apparatus for processing semiconductor wafers'20016,213,478'Holding mechanism for a susceptor in a substrate processing reactor'20016,163,015'Substrate support element'20006,151,447'Rapid thermal processing apparatus for processing semiconductor wafers'20005,710,407'Rapid thermal processing apparatus for processing semiconductor wafers'19985,683,518'Rapid thermal processing apparatus for processing semiconductor wafers'19975,444,217'Rapid thermal processing apparatus for processing semiconductor wafers'19954,770,590'Method and apparatus for transferring wafers between cassettes and a boat'1988Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1988–2003Based in San Jose, CA, US· patent location history
1995–2013Patents assigned to MOORE EPITAXIAL INC (15)· patent assignee history
2000Patents assigned to MOORE TECHNOLOGIES (1)· patent assignee history
2010–2013Based in Oakdale, CA, US· patent location history
2013Patents assigned to BEESE STEVEN C (1)· patent assignee history
2013Patents assigned to MOORE GARY M (1)· patent assignee history
2013Patents assigned to NISHIKAWA KATSUHITO (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MOORE EPITAXIAL INC | 15 | 1995–2013 |
| BEESE STEVEN C | 1 | 2013 |
| MOORE GARY M | 1 | 2013 |
| MOORE TECHNOLOGIES | 1 | 2000 |
| NISHIKAWA KATSUHITOself | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 15 | 1988–2003 |
| Oakdale, California, US | 2 | 2010–2013 |