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Inventor

Katsumasa Kawasaki

Inventor
San Jose, CA, US

Overview

13→
Patents
2013–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 13 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01LSemiconductor devices19%
H05HPlasma technique8%
C23FNon-mechanical removal of metallic material from surface6%
H03KPulse technique6%
G01RMeasuring electric variables3%
PatentTitleYear
10,854,427Radio frequency (RF) pulsing impedance tuning with multiplier mode202010,790,126Smart RF pulsing tuning using variable frequency generators202010,593,518Methods and apparatus for etching semiconductor structures202010,468,233RF power delivery regulation for processing substrates201910,424,467Smart RF pulsing tuning using variable frequency generators20199,872,373'Smart multi-level RF pulsing methods'20189,788,405'RF power delivery with approximated saw tooth wave pulsing'20179,754,767'RF pulse reflection reduction for processing substrates'20179,741,539'RF power delivery regulation for processing substrates'20179,614,524'Automatic impedance tuning with RF dual level pulsing'20179,269,587'Methods for etching materials using synchronized RF pulses'20168,962,488'Synchronized radio frequency pulsing for plasma etching'20158,404,598'Synchronized radio frequency pulsing for plasma etching'2013

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2013–2020Patents assigned to APPLIED MATERIALS INC (13)· patent assignee history
2013Patents assigned to AGARWAL ANKUR (1)· patent assignee history
2013Patents assigned to KAWASAKI KATSUMASA (1)· patent assignee history
2013Patents assigned to LIAO BRYAN (1)· patent assignee history
2013Patents assigned to NGUYEN DUY D (1)· patent assignee history
2013–2015Based in Los Gatos, CA, US· patent location history
2016–2020Based in San Jose, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC132013–2020
AGARWAL ANKUR12013
KAWASAKI KATSUMASAself12013
LIAO BRYAN12013
NGUYEN DUY D12013
Locations
LocationPatentsSpan
San Jose, California, US112016–2020
Los Gatos, California, US22013–2015