Inventor
Liran Yerushalmi
Inventor
Zicron Yaacob, IL
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01LSemiconductor devices23%
H10DInorganic electric semiconductor devices6%
G01DMeasuring not specially adapted for a specific variable3%
G06FElectric digital data processing3%
G06TImage data processing or generation, in general3%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
PatentTitleYear
11,075,126Misregistration measurements using combined optical and electron beam technology202111,054,752Device metrology targets and methods202110,943,838Measurement of overlay error using device inspection system202110,763,146Recipe optimization based zonal analysis202010,725,385Optimizing the utilization of metrology tools202010,571,811Device metrology targets and methods202010,551,749Metrology targets with supplementary structures in an intermediate layer202010,409,171Overlay control with non-zero offset prediction201910,331,050Lithography systems with integrated metrology tools having enhanced functionalities201910,095,121Optimizing the utilization of metrology tools2018Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2018–2021Patents assigned to KLA TENCOR CORP (10)· patent assignee history
2018Based in Yaacob, IL· patent location history
2019–2021Based in Zicron Yaacob, IL· patent location history
2021Patents assigned to KLA CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 10 | 2018–2021 |
| KLA CORP | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Zicron Yaacob, IL | 9 | 2019–2021 |
| Yaacob, IL | 1 | 2018 |