Inventor
SZU-PING TUNG
Inventor
TW
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices36%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1028%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H10BElectronic memory devices6%
H10NElectric solid-state devices not otherwise provided for6%
H10DInorganic electric semiconductor devices3%
PatentTitleYear
12,451,393Etch stop layer for semiconductor devices202512,400,875Film deposition for patterning process202512,374,588Method for evaluating non-uniform stress202512,205,824Patterning material including silicon-containing layer and method for semiconductor device fabrication202512,159,838Method of forming an interconnect structure having an air gap and structure thereof202412,057,445Method of manufacturing a semiconductor device and a semiconductor device202411,991,930Memory device and method for fabricating the same202411,804,410Thin-film non-uniform stress evaluation202311,769,693Metal-based etch-stop layer202311,715,640Patterning material including silicon-containing layer and method for semiconductor device fabrication202311,682,624Method of forming an interconnect structure having an air gap and structure thereof202311,651,993Etch stop layer for semiconductor devices202311,515,474Memory device and method for fabricating the same202211,322,396Etch stop layer for semiconductor devices2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (14)· patent assignee history
2022–2025Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 14 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 14 | 2022–2025 |