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Inventor

Fu-Hsing Shen

Inventor
Hsinchu, TW

Overview

1→
Patents
2001
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests50%
PatentTitleYear
6,214,128'Method and apparatus for preventing silicon hole defect formation after wet cleaning'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001Patents assigned to TAIWAN SEMICONDUCTOR MFG (1)· patent assignee history
2001Based in Hsinchu, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG12001
Locations
LocationPatentsSpan
Hsinchu, TW12001