Inventor
SUNIL KAPOOR
Inventor
US
Overview
Patents· 20 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps26%
H01LSemiconductor devices14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
C23CCoating metallic material10%
H03HImpedance networks, e.g. resonant circuits10%
G01RMeasuring electric variables6%
H05HPlasma technique4%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
H01RElectrically-conductive connections3%
H02MApparatus for conversion between ac and ac, between ac and dc, or between dc and dc, and for use with mains or similar power supply systems3%
PatentTitleYear
12,586,757Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system202612,526,923Selected reject band non-radiofrequency-coupling tile and associated methods and systems202612,401,338Multiple-output radiofrequency matching module and associated methods202512,394,598Capacitance measurement without disconnecting from high power circuit202512,322,582Anomalous plasma event detection and mitigation in semiconductor processing202512,205,796Radio frequency power generator having multiple output ports202512,176,189Early warning systems and methods for determining capacitor failures202412,143,087Combiner and distributor for adjusting impedances or power across multiple plasma processing stations202412,051,630RF current measurement in semiconductor processing tool202412,052,006Mutually induced filters202412,040,770Multiple-output radiofrequency matching module and associated methods202411,994,542RF signal parameter measurement in an integrated circuit fabrication chamber202411,881,381Capacitance measurement without disconnecting from high power circuit202411,823,928Control of wafer bow in multiple stations202311,784,027Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal202311,594,397Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system202311,264,207Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal202211,258,421Combiner and distributor for adjusting impedances or power across multiple plasma processing stations202211,258,420Mutually induced filters202211,183,406Control of wafer bow in multiple stations2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to LAM RES CORP (20)· patent assignee history
2021–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 20 | 2021–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 20 | 2021–2026 |