Inventor

Paul Z. Wirth

Inventor

Kalispell, MT, US

Overview

23→

Patents

2002–2021

Patent span

Electricity

Primary field (CPC H)

Patents· 23 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests19%

H01LSemiconductor devices13%

B08BCleaning in general8%

B25JManipulators5%

C25DProcesses for the electrolytic or electrophoretic production of coatings5%

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%

G01BMeasuring length, thickness or similar linear dimensions3%

G06TImage data processing or generation, in general3%

H04NPictorial communication, e.g. television3%

PatentTitleYear

11,117,265Robot for simultaneous substrate transfer2021 11,107,709Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods2021 11,032,464Methods and apparatus for absolute and relative depth measurements using camera focus distance2021 10,923,374Walking beam chamber2021 10,837,119Microelectronic substrate electro processing system2020 10,498,948Methods and apparatus for absolute and relative depth measurements using camera focus distance2019 10,453,725Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same2019 10,087,544Microelectronic substrate electro processing system2018 9,799,544'Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing'2017 9,399,827'Microelectronic substrate electro processing system'2016 9,245,767'Anneal module for semiconductor wafers'2016 7,934,898'High throughput semiconductor wafer processing'2011 7,541,299'Method and apparatus for thermally processing microelectronic workpieces'2009 7,531,060'Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces'2009 7,337,663'Sonic energy process chamber'2008 7,144,813'Method and apparatus for thermally processing microelectronic workpieces'2006 6,969,682'Single workpiece processing system'2005 6,930,046'Single workpiece processing system'2005 6,806,194'Apparatus and methods for processing a workpiece'2004 6,680,253'Apparatus for processing a workpiece'2004 6,548,411'Apparatus and methods for processing a workpiece'2003 6,511,914'Reactor for processing a workpiece using sonic energy'2003 6,492,284'Reactor for processing a workpiece using sonic energy'2002

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2002–2011Patents assigned to SEMITOOL INC (12)· patent assignee history

2002–2011Based in Whitefish, MT, US· patent location history

2005–2009Based in Columbia Falls, MT, US· patent location history

2016–2021Patents assigned to APPLIED MATERIALS INC (11)· patent assignee history

2016–2021Based in Kalispell, MT, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
SEMITOOL INC	12	2002–2011
APPLIED MATERIALS INC	11	2016–2021

Locations

Location	Patents	Span
Kalispell, MT, US	11	2016–2021
Whitefish, MT, US	6	2002–2011
Columbia Falls, MT, US	6	2005–2009