LexDanaLexDanabeta
Inventor

Masato Toyota

Inventor
Tokyo, JP

Overview

2→
Patents
1997–2004
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties33%
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
6,768,542'Defect inspecting device for substrate to be processed and method of manufacturing semiconductor device'20045,679,204'Plasma apparatus'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997Patents assigned to MITSUBISHI ELECTRIC CORP (1)· patent assignee history
1997Patents assigned to RYODEN SEMICONDUCTOR SYST ENG (1)· patent assignee history
1997Patents assigned to SHIKOKU INSTRUMENTATION CO LTD (1)· patent assignee history
1997–2004Based in Tokyo, JP· patent location history
2004Patents assigned to MITSUBISHI ELECTRIC ENG (1)· patent assignee history
2004Patents assigned to RENESAS TECH CORP (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
MITSUBISHI ELECTRIC CORP11997
MITSUBISHI ELECTRIC ENG12004
RENESAS TECH CORP12004
RYODEN SEMICONDUCTOR SYST ENG11997
SHIKOKU INSTRUMENTATION CO LTD11997
Locations
LocationPatentsSpan
Tokyo, JP21997–2004