Inventor
Michael R. Biche
Inventor
Union City, CA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
Y10Sprimary
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
B25JManipulators4%
B41JTypewriters4%
B60LPropulsion of electrically-propelled vehicles4%
G01BMeasuring length, thickness or similar linear dimensions4%
G05BControl or regulating systems in general4%
G05DSystems for controlling or regulating non-electric variables4%
H02JElectric power networks4%
PatentTitleYear
5,935,768'Method of processing a substrate in a photolithography system utilizing a thermal process module'19995,766,824'Method and apparatus for curing photoresist'19985,651,823'Clustered photolithography system'19975,553,994'Thermal process module for substrate coat/develop system'19965,443,348'Cassette input/output unit for semiconductor processing system'19954,698,775'Self-contained mobile reprogrammable automation device'19874,654,573'Power transfer device'19874,615,615'Laser positioning system'19864,402,623'Apparatus for dynamically adjusting paper tension in a linear manner'1983Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1983Patents assigned to QUME CORP (1)· patent assignee history
1983Based in Sunnyvale, CA, US· patent location history
1986–1987Patents assigned to FLEXIBLE MFG SYSTEMS (3)· patent assignee history
1986–1987Based in Newark, CA, US· patent location history
1995–1999Patents assigned to SEMICONDUCTOR SYSTEMS INC (5)· patent assignee history
1995–1999Based in Union City, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SEMICONDUCTOR SYSTEMS INC | 5 | 1995–1999 |
| FLEXIBLE MFG SYSTEMS | 3 | 1986–1987 |
| QUME CORP | 1 | 1983 |
Locations
| Location | Patents | Span |
|---|---|---|
| Union City, California, US | 5 | 1995–1999 |
| Newark, California, US | 3 | 1986–1987 |
| Sunnyvale, California, US | 1 | 1983 |