Inventor
Tetsuya Miyashita
Inventor
Nirasaki, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
C23CCoating metallic material17%
H01JElectric discharge tubes or discharge lamps12%
H10NElectric solid-state devices not otherwise provided for7%
F16KValves5%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors2%
C09KMaterials for miscellaneous applications, not provided for elsewhere2%
G01NInvestigating or analysing materials by determining their chemical or physical properties2%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein2%
PatentTitleYear
10,998,205Substrate processing apparatus and manufacturing method of semiconductor device202110,468,237Substrate processing apparatus201910,392,688Film forming apparatus201910,325,801Mounting table system, substrate processing apparatus, and temperature control method201910,049,860Substrate processing apparatus201810,014,145Vacuum exhaust method20189,790,590'Vacuum-processing apparatus, vacuum-processing method, and storage medium'20179,673,078'Cooling processing apparatus and method for operating the same'20179,303,788'Load lock device'20169,121,515'Gate valve unit, substrate processing device and substrate processing method thereof'20157,389,677'Measuring method and device for liquid crystal viscosity coefficient'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008Patents assigned to AOMORI SUPPORT CT FOR IND PROM (1)· patent assignee history
2008Based in Sendai, JP· patent location history
2015–2019Patents assigned to TOKYO ELECTRON LTD (9)· patent assignee history
2015Patents assigned to HARA MASAMICHI (1)· patent assignee history
2015Patents assigned to MIYASHITA TETSUYA (1)· patent assignee history
2015–2019Based in Yamanashi, JP· patent location history
2016–2019Based in Nirasaki, JP· patent location history
2021Patents assigned to KOKUSAI ELECTRIC CORP (1)· patent assignee history
2021Based in Toyama, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 9 | 2015–2019 |
| AOMORI SUPPORT CT FOR IND PROM | 1 | 2008 |
| HARA MASAMICHI | 1 | 2015 |
| KOKUSAI ELECTRIC CORP | 1 | 2021 |
| MIYASHITA TETSUYAself | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 6 | 2016–2019 |
| Yamanashi, JP | 3 | 2015–2019 |
| Toyama, JP | 1 | 2021 |
| Sendai, JP | 1 | 2008 |