Inventor
Makoto Kashibe
Inventor
Tokuyama, JP
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps60%
G01RMeasuring electric variables40%
PatentTitleYear
7,125,730'Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same'20067,025,895'Plasma processing apparatus and method'20066,713,885'Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2006Patents assigned to HITACHI HIGH TECH CORP (3)· patent assignee history
2004–2006Based in Tokuyama, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI HIGH TECH CORP | 3 | 2004–2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokuyama, JP | 3 | 2004–2006 |