Inventor
Francisco Juarez
Inventor
Fremont, CA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
C23CCoating metallic material11%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests11%
B08BCleaning in general7%
B23HWorking of metal by the action of a high concentration of electric current on a workpiece using an electrode which takes the place of a tool7%
H01JElectric discharge tubes or discharge lamps7%
H03HImpedance networks, e.g. resonant circuits7%
H05HPlasma technique7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
B24BMachines, devices, or processes for grinding or polishing4%
PatentTitleYear
9,918,376'Hybrid impedance matching for inductively coupled plasma system'20189,362,163'Methods and apparatuses for atomic layer cleaning of contacts and vias'20169,082,589'Hybrid impedance matching for inductively coupled plasma system'20157,700,155'Method and apparatus for modulation of precursor exposure during a pulsed deposition process'20107,695,597'Conductive planarization assembly for electrochemical mechanical planarization of a work piece'20107,503,334'Apparatus and methods for processing semiconductor substrates using supercritical fluids'20097,391,086'Conductive contacts and methods for fabricating conductive contacts for elctrochemical planarization of a work piece'20086,951,765'Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor'20056,867,152'Properties of a silica thin film produced by a rapid vapor deposition (RVD) process'20056,848,458'Apparatus and methods for processing semiconductor substrates using supercritical fluids'20056,550,484'Apparatus for maintaining wafer back side and edge exclusion during supercritical fluid processing'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2018Patents assigned to NOVELLUS SYSTEMS INC (10)· patent assignee history
2003–2018Based in Fremont, CA, US· patent location history
2015Patents assigned to JUAREZ FRANCISCO J (1)· patent assignee history
2015Patents assigned to THOMAS GEORGE (1)· patent assignee history
2015Patents assigned to WONGSENAKHUM PANYA (1)· patent assignee history
2016–2018Patents assigned to LAM RES CORP (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NOVELLUS SYSTEMS INC | 10 | 2003–2018 |
| LAM RES CORP | 2 | 2016–2018 |
| JUAREZ FRANCISCO Jself | 1 | 2015 |
| THOMAS GEORGE | 1 | 2015 |
| WONGSENAKHUM PANYA | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 11 | 2003–2018 |