LexDanaLexDanabeta
Inventor

Philipp Jaschinsky

Inventor
Dresden, DE

Overview

2→
Patents
2017–2018
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
G05BControl or regulating systems in general17%
G06FElectric digital data processing17%
H01LSemiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
PatentTitleYear
9,966,315Advanced process control methods for process-aware dimension targeting20189,798,244'Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity'2017

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2017–2018Patents assigned to GLOBALFOUNDRIES INC (2)· patent assignee history
2017–2018Based in Dresden, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
GLOBALFOUNDRIES INC22017–2018
Locations
LocationPatentsSpan
Dresden, DE22017–2018