Inventor
Avijit K. Ray-Chaudhuri
Inventor
Livermore, CA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices44%
B82YSpecific uses or applications of nanostructures22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
G02BOptical elements, systems or apparatus6%
G06TImage data processing or generation, in general6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
PatentTitleYear
10,127,652Defect detection and classification based on attributes determined from a standard reference image20187,345,754'Fourier filters and wafer inspection systems'20086,441,885'Low thermal distortion extreme-UV lithography reticle'20026,395,455'Low thermal distortion Extreme-UV lithography reticle and method'20026,316,150'Low thermal distortion extreme-UV lithography reticle'20016,285,497'Diffractive element in extreme-UV lithography condenser'20016,235,434'Method for mask repair using defect compensation'20016,206,528'Surface figure control for coated optics'20016,198,792'Wafer chamber having a gas curtain for extreme-UV lithography'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2002Patents assigned to EUV LLC (7)· patent assignee history
2001–2002Based in Livermore, CA, US· patent location history
2008Patents assigned to KLA TENCOR TECH CORP (1)· patent assignee history
2008–2018Based in San Ramon, CA, US· patent location history
2018Patents assigned to KLA TENCOR CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EUV LLC | 7 | 2001–2002 |
| KLA TENCOR CORP | 1 | 2018 |
| KLA TENCOR TECH CORP | 1 | 2008 |
Locations
| Location | Patents | Span |
|---|---|---|
| Livermore, California, US | 7 | 2001–2002 |
| San Ramon, California, US | 2 | 2008–2018 |