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Inventor

Joseph E. Shaver

Inventor
South Burlington, VT, US

Overview

2→
Patents
2005
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
6,944,578'Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus'20056,917,901'Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus'2005

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2005Patents assigned to IBM (2)· patent assignee history
2005Based in South Burlington, VT, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
IBM22005
Locations
LocationPatentsSpan
South Burlington, VT, US22005