Inventor
Surajit Kumar
Inventor
Sunnyvale, CA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
C23CCoating metallic material16%
Y10TTechnical subjects covered by former us classification12%
B23BTurning8%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling8%
F28FDetails of heat-exchange and heat-transfer apparatus, of general application8%
H01LSemiconductor devices8%
H05HPlasma technique8%
C30BSingle-crystal growth4%
PatentTitleYear
10,386,126Apparatus for controlling temperature uniformity of a substrate201910,132,003Heating modulators to improve epi uniformity tuning201810,119,192EPI base ring20189,768,043'Quartz upper and lower domes'20179,322,097'EPI base ring'20169,267,742'Apparatus for controlling the temperature uniformity of a substrate'20169,248,509'Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity'20168,822,876'Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity'20148,629,370'Assembly for delivering RF power and DC voltage to a plasma processing chamber'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2019Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2014–2016Patents assigned to BUCHBERGER JR DOUGLAS A (4)· patent assignee history
2014–2016Patents assigned to KUMAR SURAJIT (4)· patent assignee history
2014–2016Patents assigned to TAVASSOLI HAMID (4)· patent assignee history
2014–2016Patents assigned to BERA KALLOL (3)· patent assignee history
2014–2019Based in Sunnyvale, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2014–2019 |
| BUCHBERGER JR DOUGLAS A | 4 | 2014–2016 |
| KUMAR SURAJITself | 4 | 2014–2016 |
| TAVASSOLI HAMID | 4 | 2014–2016 |
| BERA KALLOL | 3 | 2014–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 9 | 2014–2019 |