Inventor
YOSHINOBU HAYAKAWA
Inventor
JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material17%
H01JElectric discharge tubes or discharge lamps17%
H01LSemiconductor devices17%
H05HPlasma technique17%
H10DInorganic electric semiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
PatentTitleYear
12,482,663Processing apparatus2025Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2025Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 1 | 2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 1 | 2025 |