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Inventor

Joseph A. Maher

Inventor
South Hamilton, MA, US

Overview

17→
Patents
1983–2004
Patent span
Electricity
Primary field (CPC H)

Patents· 17 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01JElectric discharge tubes or discharge lamps26%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests21%
F16KValves8%
Y10TTechnical subjects covered by former us classification8%
C23FNon-mechanical removal of metallic material from surface3%
F04DNon-positive-displacement pumps3%
F17DPipe-line systems3%
PatentTitleYear
6,776,846'Integrated processing system having multiple reactors connected to a central chamber'20046,413,320'Integrated processing system having multiple reactors connected to a central chamber'20026,409,149'Dual pendulum valve assembly with valve seat cover'20026,328,051'Dual pendulum valve assembly'20016,214,119'Vacuum substrate processing system having multiple processing chambers and a central load/unload chamber'20016,186,177'Integrated gas delivery system'20016,161,576'Integrated turbo pump and control valve system'20006,103,055'System for processing substrates'20005,344,542'Multiple-processing and contamination-free plasma etching system'19945,308,431'System providing multiple processing of substrates'19945,248,371'Hollow-anode glow discharge apparatus'19935,102,495'Method providing multiple-processing of substrates'19925,076,205'Modular vapor processor system'19915,013,385'Quad processor'19914,715,921'Quad processor'1987D0275032'Plasma cassette etcher'19844,381,965'Multi-planar electrode plasma etching'1983

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1983–1984Patents assigned to DRYTEK INC (2)· patent assignee history
1983–2000Based in Hamilton, MA, US· patent location history
1987–1994Patents assigned to GEN SIGNAL CORP (7)· patent assignee history
1987–2004Based in South Hamilton, MA, US· patent location history
1991–2002Based in Wenham, MA, US· patent location history
2000–2004Patents assigned to APPLIED MATERIALS INC (4)· patent assignee history
2000–2002Patents assigned to MKS INSTR INC (4)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
GEN SIGNAL CORP71987–1994
APPLIED MATERIALS INC42000–2004
MKS INSTR INC42000–2002
DRYTEK INC21983–1984
Locations
LocationPatentsSpan
South Hamilton, Massachusetts, US91987–2004
Wenham, Massachusetts, US51991–2002
Hamilton, Massachusetts, US31983–2000