Inventor
Li-Lin Su
Inventor
Taichung, TW
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Wprimary
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1039%
H01LSemiconductor devices24%
H10DInorganic electric semiconductor devices15%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
PatentTitleYear
10,700,010Copper contact plugs with barrier layers202010,534,273Multi-metal fill with self-aligned patterning and dielectric with voids20209,935,006Trench liner for removing impurities in a non-copper trench20189,721,894'Semiconductor device and manufacturing method thereof'20179,614,052'Copper contact plugs with barrier layers'20179,589,897'Trench liner for removing impurities in a non-copper trench'20179,530,737'Semiconductor device and manufacturing method thereof'20169,136,206'Copper contact plugs with barrier layers'20158,252,690'In situ Cu seed layer formation for improving sidewall coverage'20128,034,709'Method for forming composite barrier layer'20117,704,886'Multi-step Cu seed layer formation for improving sidewall coverage'20107,453,149'Composite barrier layer'20087,253,501'High performance metallization cap layer'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2015Patents assigned to TAIWAN SEMICONDUCTOR MFG (6)· patent assignee history
2007–2020Based in Taichung, TW· patent location history
2010–2020Based in Dongshih, TW· patent location history
2012–2015Patents assigned to HSIEH CHING-HUA (2)· patent assignee history
2012–2015Patents assigned to SU LI-LIN (2)· patent assignee history
2015Patents assigned to CHEN HUANG-MING (1)· patent assignee history
2016–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (7)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 7 | 2016–2020 |
| TAIWAN SEMICONDUCTOR MFG | 6 | 2007–2015 |
| HSIEH CHING-HUA | 2 | 2012–2015 |
| SU LI-LINself | 2 | 2012–2015 |
| CHEN HUANG-MING | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Taichung, TW | 8 | 2007–2020 |
| Dongshih, TW | 5 | 2010–2020 |