Inventor
Koutarou Sho
Inventor
Yokohama, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
H01LSemiconductor devices10%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1010%
F27BFurnaces, kilns, ovens or retorts in general5%
F27DDetails or accessories of furnaces, kilns, ovens or retorts, in so far as they are of kinds occurring in more than one kind of furnace5%
G01BMeasuring length, thickness or similar linear dimensions5%
G01QScanning-probe techniques or apparatus5%
H01JElectric discharge tubes or discharge lamps5%
H10BElectronic memory devices5%
PatentTitleYear
10,068,915Manufacturing method for a semiconductor device including resist films different in thickness20189,972,547Measurement method, manufacturing method of device, and measurement system20188,119,313'Method for manufacturing semiconductor device'20127,683,291'Substrate processing method and manufacturing method of semiconductor device'20107,662,542'Pattern forming method and semiconductor device manufacturing method'20106,162,745'Film forming method'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2012Patents assigned to TOSHIBA KK (4)· patent assignee history
2000–2010Based in Yokohama, JP· patent location history
2012Patents assigned to AZUMA TSUKASA (1)· patent assignee history
2012Patents assigned to KOBAYASHI KATSUTOSHI (1)· patent assignee history
2012Patents assigned to MUTO DAIZO (1)· patent assignee history
2012Based in Kanagawa, JP· patent location history
2018Patents assigned to TOSHIBA MEMORY CORP (2)· patent assignee history
2018Based in Yokkaichi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOSHIBA KK | 4 | 2000–2012 |
| TOSHIBA MEMORY CORP | 2 | 2018 |
| AZUMA TSUKASA | 1 | 2012 |
| KOBAYASHI KATSUTOSHI | 1 | 2012 |
| MUTO DAIZO | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yokohama, JP | 3 | 2000–2010 |
| Yokkaichi, JP | 2 | 2018 |
| Kanagawa, JP | 1 | 2012 |