Inventor
Herbert Vonach
Inventor
Klosterneuburg, AT
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps60%
B82YSpecific uses or applications of nanostructures33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
PatentTitleYear
8,049,189'Charged particle system'20116,989,546'Particle multibeam lithography'20066,768,125'Maskless particle-beam system for exposing a pattern on a substrate'20045,876,880'Process for producing a structured mask'19995,874,739'Arrangement for shadow-casting lithography'19995,801,388'Particle beam, in particular ionic optic imaging system'19985,742,062'Arrangement for masked beam lithography by means of electrically charged particles'19985,693,950'Projection system for charged particles'19975,436,460'Ion-optical imaging system'19955,378,917'Particle-beam imaging system'1995Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1995–1999Patents assigned to IMS IONEN MIKROFAB SYST (4)· patent assignee history
1995Patents assigned to IMS IONEN MIKROFABRATIONS SYST (1)· patent assignee history
1995–2011Based in Klosterneuburg, AT· patent location history
1995–1997Based in Klosterneuberg, AT· patent location history
1998Patents assigned to IMS IONEN MIKROPFABRIKATIONS S (1)· patent assignee history
1998Patents assigned to IMS MIKROFABRIKATIONS SYSTEME (1)· patent assignee history
2006Patents assigned to IMS INNENMIKROFABRIKATIONS SYS (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IMS IONEN MIKROFAB SYST | 4 | 1995–1999 |
| IMS INNENMIKROFABRIKATIONS SYS | 1 | 2006 |
| IMS IONEN MIKROFABRATIONS SYST | 1 | 1995 |
| IMS IONEN MIKROPFABRIKATIONS S | 1 | 1998 |
| IMS MIKROFABRIKATIONS SYSTEME | 1 | 1998 |
Locations
| Location | Patents | Span |
|---|---|---|
| Klosterneuburg, AT | 8 | 1995–2011 |
| Klosterneuberg, AT | 2 | 1995–1997 |