Inventor
JOHN HOLLAND
Inventor
US
Overview
Patents· 21 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps58%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
H01LSemiconductor devices9%
H03HImpedance networks, e.g. resonant circuits6%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form3%
C09KMaterials for miscellaneous applications, not provided for elsewhere3%
C23CCoating metallic material3%
G06FElectric digital data processing3%
PatentTitleYear
12,525,458Plasma uniformity control using a pulsed magnetic field202612,505,991Tunability of edge plasma density for tilt control202512,476,082Radiofrequency signal filter arrangement for plasma processing system202512,354,840Systems and methods for optimizing power delivery to an electrode of a plasma chamber202512,340,989Electrostatic edge ring mounting system for substrate processing202512,315,705Distortion of pulses for wafer biasing202512,308,211Systems and methods for use of low frequency harmonics in bias radiofrequency supply to control uniformity of plasma process results across substrate202512,266,505Systems and methods for using binning to increase power during a low frequency cycle202512,255,052Process control for ion energy delivery using multiple generators and phase control202512,139,791Showerhead faceplates with angled gas distribution passages for semiconductor processing tools202412,131,886Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system202412,080,518Impedance match with an elongated RF strap202412,064,941UV stable fire-resistant glazing laminates202411,935,726High speed synchronization of plasma source/bias power delivery202411,935,730Systems and methods for cleaning an edge ring pocket202411,908,660Systems and methods for optimizing power delivery to an electrode of a plasma chamber202411,887,819Systems for cooling RF heated chamber components202411,580,224Power detection for identifying suspicious devices202311,495,441Systems for cooling RF heated chamber components202211,335,539Systems and methods for optimizing power delivery to an electrode of a plasma chamber202211,158,488High speed synchronization of plasma source/bias power delivery2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to LAM RES CORP (19)· patent assignee history
2021–2024Patents assigned to MKS INSTR INC (2)· patent assignee history
2021–2026Based in US· patent location history
2023Patents assigned to TARGET BRANDS INC (1)· patent assignee history
2024Patents assigned to PYROGUARD UK LTD (1)· patent assignee history
2024Based in GB· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 19 | 2021–2026 |
| MKS INSTR INC | 2 | 2021–2024 |
| PYROGUARD UK LTD | 1 | 2024 |
| TARGET BRANDS INC | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 20 | 2021–2026 |
| GB | 1 | 2024 |