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Inventor

Junya Oka

Inventor
Nirasaki, JP

Overview

2→
Patents
2020–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material22%
H01JElectric discharge tubes or discharge lamps22%
H01LSemiconductor devices22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H05HPlasma technique11%
PatentTitleYear
10,968,514Substrate mounting table202110,738,374Method of performing a surface treatment on a mounting table, the mounting table and a plasma processing apparatus2020

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2020–2021Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2020–2021Based in Nirasaki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22020–2021
Locations
LocationPatentsSpan
Nirasaki, JP22020–2021