Inventor
STEVE BURGESS
Inventor
GB
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material21%
H01JElectric discharge tubes or discharge lamps18%
H01LSemiconductor devices11%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
B81BMicrostructural devices or systems, e.g. micromechanical devices5%
H03HImpedance networks, e.g. resonant circuits5%
H05HPlasma technique5%
C01BNon-metallic elements3%
PatentTitleYear
12,488,969Deposition apparatus202512,207,556Method of deposition202512,043,891Deposition method of a metallic layer on a substrate of a resonator device202411,961,722Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition202411,913,109Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition202411,718,908DC magnetron sputtering202311,521,840Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition202211,361,975Method of fabricating integrated circuits202211,251,037Method of depositing silicon nitride2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to SPTS TECHNOLOGIES LTD (9)· patent assignee history
2022–2025Based in GB· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SPTS TECHNOLOGIES LTD | 9 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| GB | 9 | 2022–2025 |