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Inventor

Qian Shao Shou

Inventor
Sagamihara, JP

Overview

1→
Patents
2001
Patent span
Chemistry
Primary field (CPC C)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C01Bprimary
C01BNon-metallic elements33%
C30BSingle-crystal growth33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
6,224,934'Ozone-processing apparatus for semiconductor process system'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2001Based in Sagamihara, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD12001
Locations
LocationPatentsSpan
Sagamihara, JP12001