LexDanaLexDanabeta
Inventor

YU IMAMURA

Inventor
JP

Overview

1→
Patents
2024
Patent span
Performing operations
Primary field (CPC B)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general33%
B24BMachines, devices, or processes for grinding or polishing33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
12,128,449Substrate cleaning device, substrate processing apparatus, break-in device, method for estimating number of fine particles adhering to substrate, method for determining degree of contamination of substrate cleaning member, and method for determining break-in processing2024

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2024Patents assigned to EBARA CORP (1)· patent assignee history
2024Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
EBARA CORP12024
Locations
LocationPatentsSpan
JP12024