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Inventor

Shang-Yuan Yu

Inventor
Hsinchu, TW

Overview

5→
Patents
2016–2019
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
A46BBrushes8%
B08BCleaning in general8%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
PatentTitleYear
10,510,527Single wafer cleaning tool with H201910,486,204Semiconductor apparatus and method of removing photoresist layer on substrate20199,805,946'Photoresist removal'20179,781,994'Wafer cleaning'20179,349,617'Mechanisms for wafer cleaning'2016

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2016–2019Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (5)· patent assignee history
2016–2019Based in Hsinchu, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD52016–2019
Locations
LocationPatentsSpan
Hsinchu, TW52016–2019