Inventor
Laurent Khuat Duy
Inventor
Eindhoven, NL
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
G01BMeasuring length, thickness or similar linear dimensions15%
G02BOptical elements, systems or apparatus15%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
G01NInvestigating or analysing materials by determining their chemical or physical properties8%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them8%
PatentTitleYear
9,488,465'Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus'20169,081,302'Inspection apparatus and method, lithographic apparatus and lithographic processing cell'20158,675,210'Level sensor, lithographic apparatus, and substrate surface positioning method'20148,610,898'Self-referencing interferometer, alignment system, and lithographic apparatus'20138,570,487'Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2016Patents assigned to ASML NETHERLANDS BV (5)· patent assignee history
2013–2015Patents assigned to KHUAT DUY LAURENT (4)· patent assignee history
2013–2016Based in Eindhoven, NL· patent location history
2014–2015Patents assigned to DEN BOEF ARIE JEFFREY (2)· patent assignee history
2014Patents assigned to BENSCHOP JOZEF PETRUS HENRICUS (1)· patent assignee history
2014Patents assigned to BRINKHOF RALPH (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 5 | 2013–2016 |
| KHUAT DUY LAURENTself | 4 | 2013–2015 |
| DEN BOEF ARIE JEFFREY | 2 | 2014–2015 |
| BENSCHOP JOZEF PETRUS HENRICUS | 1 | 2014 |
| BRINKHOF RALPH | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 5 | 2013–2016 |