Inventor
Masahiro Mimasaka
Inventor
Kyoto, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices35%
G03DApparatus for processing exposed photographic materials18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
B05CApparatus for applying fluent materials to surfaces, in general6%
B05DProcesses for applying fluent materials to surfaces, in general6%
B24BMachines, devices, or processes for grinding or polishing6%
G01BMeasuring length, thickness or similar linear dimensions6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
PatentTitleYear
6,089,762'Developing apparatus, developing method and substrate processing apparatus'20006,076,979'Method of and apparatus for supplying developing solution onto substrate'20005,989,632'Coating solution applying method and apparatus'19995,984,540'Developing apparatus and developing method'19995,865,893'Spin coating apparatus'19995,020,200'Apparatus for treating a wafer surface'19914,998,021'Method of detecting an end point of surface treatment'1991Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1991–2000Patents assigned to DAINIPPON SCREEN MFG (7)· patent assignee history
1991–2000Based in Kyoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| DAINIPPON SCREEN MFG | 7 | 1991–2000 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyoto, JP | 7 | 1991–2000 |