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Inventor

KAZUNOBU FUJIWARA

Inventor
JP

Overview

3→
Patents
2022–2026
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
B08BCleaning in general11%
C23CCoating metallic material11%
H01LSemiconductor devices11%
H05HPlasma technique11%
PatentTitleYear
12,537,172Plasma processing method and plasma processing apparatus202611,594,398Apparatus and method for plasma processing202311,251,048Plasma processing method and plasma processing apparatus2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2026Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2022–2026Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32022–2026
Locations
LocationPatentsSpan
JP32022–2026