Inventor
Vandana Krishnamurthy
Inventor
Rolla, MO, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
Y10TTechnical subjects covered by former us classification10%
C08GMacromolecular compounds obtained otherwise than by reactions only involving unsaturated carbon-to-carbon bonds9%
C09DCoating compositions, e.g. paints, varnishes or lacquers9%
H01LSemiconductor devices9%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form5%
C07CAcyclic or carbocyclic compounds3%
C08LCompositions of macromolecular compounds3%
PatentTitleYear
RE046841Spin-on carbon compositions for lithographic processing20189,960,038Processes to pattern small features for advanced patterning needs20189,249,013'Silicon hardmask layer for directed self-assembly'20169,102,129'Spin-on carbon compositions for lithographic processing'20158,968,989'Assist layers for EUV lithography'20158,895,230'Spin-on carbon compositions for lithographic processing'20148,257,910'Underlayers for EUV lithography'20126,962,769'Anti-reflective coating composition with improved spin bowl compatibility'20056,872,506'Wet-developable anti-reflective compositions'20056,740,469'Developer-soluble metal alkoxide coatings for microelectronic applications'20045,919,599'Thermosetting anti-reflective coatings at deep ultraviolet'19995,892,096'Non-subliming mid-UV dyes and ultra-thin organic arcs having differential solubility'19995,688,987'Non-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubility'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2018Patents assigned to BREWER SCIENCE INC (13)· patent assignee history
1997–2018Based in Rolla, MO, US· patent location history
2012–2018Patents assigned to KRISHNAMURTHY VANDANA (2)· patent assignee history
2012Patents assigned to GUERRERO DOUGLAS J (1)· patent assignee history
2018Patents assigned to BRAKENSIEK NICKOLAS L (1)· patent assignee history
2018Patents assigned to LAMB III JAMES E (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BREWER SCIENCE INC | 13 | 1997–2018 |
| KRISHNAMURTHY VANDANAself | 2 | 2012–2018 |
| BRAKENSIEK NICKOLAS L | 1 | 2018 |
| GUERRERO DOUGLAS J | 1 | 2012 |
| LAMB III JAMES E | 1 | 2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Rolla, MO, US | 13 | 1997–2018 |