LexDanaLexDanabeta
Inventor

Soudai EMORI

Inventor
JP

Overview

3→
Patents
2023–2026
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material25%
H01JElectric discharge tubes or discharge lamps25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01LSemiconductor devices17%
H05HPlasma technique8%
PatentTitleYear
12,567,563Plasma processing apparatus and plasma processing method202612,315,700Plasma processing apparatus and ceiling wall202511,574,808Plasma processing method and plasma processing apparatus2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2026Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2023–2026Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32023–2026
Locations
LocationPatentsSpan
JP32023–2026