LexDanaLexDanabeta
Inventor

CHOONG-MAN LEE

Inventor
JP

Overview

2→
Patents
2024–2025
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
12,494,369Extreme ultraviolet lithography patterning method202511,915,931Extreme ultraviolet lithography patterning method2024

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2024–2025Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2024–2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22024–2025
Locations
LocationPatentsSpan
JP22024–2025