Inventor
Sen-Nan Lee
Inventor
Hsinchu, TW
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
B08BCleaning in general11%
B24BMachines, devices, or processes for grinding or polishing11%
F16FSprings11%
H01LSemiconductor devices11%
H05KPrinted circuits11%
H10DInorganic electric semiconductor devices11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1011%
PatentTitleYear
11,031,391Method for manufacturing a FinFET device20216,955,467'Seismic isolation bearing assembly with a frame unit for supporting a machine body thereon'20056,277,751'Method of planarization'20016,116,991'Installation for improving chemical-mechanical polishing operation'20006,101,656'Wafer cleaning device'20006,022,800'Method of forming barrier layer for tungsten plugs in interlayer dielectrics'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000Patents assigned to WORLDWIDE SEMICONDUCTOR MANUFA (3)· patent assignee history
2000–2001Based in Hsinchu, TW· patent location history
2001Patents assigned to WORLDWIDE SEMICONDUCTOR MFG (1)· patent assignee history
2005Patents assigned to NAT APPLIED RES LABORATORIES (1)· patent assignee history
2005Based in Yung-Ho, TW· patent location history
2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (1)· patent assignee history
2021Based in Hsinchu County, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| WORLDWIDE SEMICONDUCTOR MANUFA | 3 | 2000 |
| NAT APPLIED RES LABORATORIES | 1 | 2005 |
| TAIWAN SEMICONDUCTOR MFG CO LTD | 1 | 2021 |
| WORLDWIDE SEMICONDUCTOR MFG | 1 | 2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu, TW | 4 | 2000–2001 |
| Hsinchu County, TW | 1 | 2021 |
| Yung-Ho, TW | 1 | 2005 |