Inventor
James A. Folta
Inventor
Livermore, CA, US
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G02Bprimary
G02BOptical elements, systems or apparatus22%
C23CCoating metallic material17%
Y10TTechnical subjects covered by former us classification17%
A61BDiagnosis6%
B82YSpecific uses or applications of nanostructures6%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices6%
G21KHandling of particles or ionising radiation not otherwise provided for6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry3%
C03CChemical composition of glasses, glazes or vitreous enamels3%
PatentTitleYear
10,901,121Planarization of optical substrates20217,473,301'Adhesive particle shielding'20097,062,348'Dynamic mask for producing uniform or graded-thickness thin films'20066,849,859'Fabrication of precision optics using an imbedded reference surface'20056,844,272'Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers'20056,780,496'Optimized capping layers for EUV multilayers'20046,668,207'Method and system using power modulation and velocity modulation producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients'20036,634,760'Low-cost method for producing extreme ultraviolet lithography optics'20036,562,404'Conformal chemically resistant coatings for microflow devices'20036,524,449'Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients'20036,425,988'Method and system using power modulation for maskless vapor deposition of spatially graded thin film and multilayer coatings with atomic-level precision and accuracy'20026,134,049'Method to adjust multilayer film stress induced deformation of optics'20006,056,331'Zero dead volume tube to surface seal'20005,783,130'Fabrication method for miniature plastic gripper'19985,644,395'Miniaturized flow injection analysis system'19975,609,608'Miniature plastic gripper and fabrication method'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2003Patents assigned to UNIV CALIFORNIA (7)· patent assignee history
1997–2021Based in Livermore, CA, US· patent location history
2004–2009Patents assigned to EUV LLC (4)· patent assignee history
2006Patents assigned to EXTREME ULTAVIOLET LITHOGRAPHY (1)· patent assignee history
2021Patents assigned to L LIVERMORE NAT SECURITY LLC (1)· patent assignee history
2021Patents assigned to UNIV COLORADO STATE RES FOUND (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| UNIV CALIFORNIA | 7 | 1997–2003 |
| EUV LLC | 4 | 2004–2009 |
| EXTREME ULTAVIOLET LITHOGRAPHY | 1 | 2006 |
| L LIVERMORE NAT SECURITY LLC | 1 | 2021 |
| UNIV COLORADO STATE RES FOUND | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Livermore, California, US | 16 | 1997–2021 |