Inventor
Nikolay N. Korovin
Inventor
Phoenix, AZ, US
Overview
Patents· 22 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing46%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
B23HWorking of metal by the action of a high concentration of electric current on a workpiece using an electrode which takes the place of a tool9%
C25FProcesses for the electrolytic removal of materials from objects9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
C25DProcesses for the electrolytic or electrophoretic production of coatings2%
G01BMeasuring length, thickness or similar linear dimensions2%
PatentTitleYear
8,268,135'Method and apparatus for electrochemical planarization of a workpiece'20127,198,545'Method of calibration and data evaluation for eddy current metrology systems'20077,189,140'Methods using eddy current for calibrating a CMP tool'20077,140,956'Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece'20067,025,664'Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece'20067,014,541'Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece'20066,974,525'Method and apparatus for electrochemical planarization of a workpiece'20056,953,382'Methods and apparatuses for conditioning polishing surfaces utilized during CMP processing'20056,951,597'Dynamic polishing fluid delivery system for a rotational polishing apparatus'20056,932,671'Method for controlling a chemical mechanical polishing (CMP) operation'20056,790,123'Method for processing a work piece in a multi-zonal processing apparatus'20046,736,952'Method and apparatus for electrochemical planarization of a workpiece'20046,659,850'Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece'20036,612,903'Workpiece carrier with adjustable pressure zones and barriers'20036,582,277'Method for controlling a process in a multi-zonal apparatus'20036,572,755'Method and apparatus for electrochemically depositing a material onto a workpiece surface'20036,544,103'Method to determine optimum geometry of a multizone carrier'20036,508,694'Multi-zone pressure control carrier'20036,503,767'Process for monitoring a process, planarizing a surface, and for quantifying the results of a planarization process'20036,468,131'Method to mathematically characterize a multizone carrier'20026,390,905'Workpiece carrier with adjustable pressure zones and barriers'20026,336,853'Carrier having pistons for distributing a pressing force on the back surface of a workpiece'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2006Patents assigned to SPEEDFAM IPEC CORP (16)· patent assignee history
2002–2012Based in Phoenix, AZ, US· patent location history
2005–2012Patents assigned to NOVELLUS SYSTEMS INC (6)· patent assignee history
2012Patents assigned to CHADDA SAKET (1)· patent assignee history
2012Patents assigned to EMESH ISMAIL (1)· patent assignee history
2012Patents assigned to KOROVIN NIKOLAY N (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SPEEDFAM IPEC CORP | 16 | 2002–2006 |
| NOVELLUS SYSTEMS INC | 6 | 2005–2012 |
| CHADDA SAKET | 1 | 2012 |
| EMESH ISMAIL | 1 | 2012 |
| KOROVIN NIKOLAY Nself | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Phoenix, AZ, US | 22 | 2002–2012 |