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Inventor

Yoshio Kawanobe

Inventor
Utsunomiya, JP

Overview

1→
Patents
2003
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
6,633,390'Focus measurement in projection exposure apparatus'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003Patents assigned to CANON KK (1)· patent assignee history
2003Based in Utsunomiya, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
CANON KK12003
Locations
LocationPatentsSpan
Utsunomiya, JP12003