Inventor
Klaus Breitschwerdt
Inventor
Filderstadt, DE
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1039%
H01JElectric discharge tubes or discharge lamps17%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems13%
F01DNon-positive displacement machines or engines, e.g. steam turbines9%
Y02TClimate change mitigation technologies related to transportation9%
Y10TTechnical subjects covered by former us classification9%
B81BMicrostructural devices or systems, e.g. micromechanical devices4%
PatentTitleYear
7,785,486'Method of etching structures into an etching body using a plasma'20107,642,545'Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof'20107,288,485'Device and method for anisotropic plasma etching of a substrate, particularly a silicon element'20077,285,228'Device and method for anisotropic plasma etching of a substrate, a silicon body in particular'20077,149,070'Holding device, in particular for fixing a semiconductor wafer in a plasma etching device, and method for supplying heat to or dissipating heat from a substrate'20067,094,706'Device and method for etching a substrate by using an inductively coupled plasma'20066,974,709'Method and device for providing a semiconductor etching end point and for detecting the end point'20056,709,546'Device and method for etching a substrate by using an inductively coupled plasma'20046,663,784'Method for producing three-dimensional structures by means of an etching process'20036,431,830'Nozzle ring for a gas turbine'20026,119,339'Nozzle ring for a gas turbine and method of manufacture thereof'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2002Patents assigned to MTU MUENCHEN GMBH (2)· patent assignee history
2000–2002Based in Lauterbach, DE· patent location history
2003–2010Patents assigned to BOSCH GMBH ROBERT (9)· patent assignee history
2003–2010Based in Filderstadt, DE· patent location history
2006Based in Weil der Stadt, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BOSCH GMBH ROBERT | 9 | 2003–2010 |
| MTU MUENCHEN GMBH | 2 | 2000–2002 |
Locations
| Location | Patents | Span |
|---|---|---|
| Filderstadt, DE | 8 | 2003–2010 |
| Lauterbach, DE | 2 | 2000–2002 |
| Weil der Stadt, DE | 1 | 2006 |