Inventor
Afshin Nickhou
Inventor
Campbell, CA, US
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests30%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
PatentTitleYear
7,234,477'Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces'20076,866,051'Megasonic substrate processing module'20056,851,436'Substrate processing using a fluid re-circulation system in a wafer scrubbing system'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2007Patents assigned to LAM RES CORP (3)· patent assignee history
2005–2007Based in Campbell, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 3 | 2005–2007 |
Locations
| Location | Patents | Span |
|---|---|---|
| Campbell, California, US | 3 | 2005–2007 |