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Inventor

Yung-Tsun Lo

Inventor
Hsinchu, TW

Overview

11→
Patents
1997–2004
Patent span
Electricity
Primary field (CPC H)

Patents· 11 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1042%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1032%
C23CCoating metallic material16%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
Y10TTechnical subjects covered by former us classification5%
PatentTitleYear
6,688,948'Wafer surface protection method'20046,228,753'Method of fabricating a bonding pad structure for improving the bonding pad surface quality'20016,190,928'Method for actually measuring misalignment of via'20016,096,645'Method of making IC devices having stable CVD titanium nitride films'20006,030,893'Chemical vapor deposition of tungsten(W-CVD) process for growing low stress and void free interconnect'20005,966,626'Method for stabilizing a silicon structure after ion implantation'19995,963,830'Method of forming a TiN/W barrier layer for a hot Al plug'19995,942,041'Non-sticking semi-conductor wafer clamp and method of making same'19995,908,659'Method for reducing the reflectivity of a silicide layer'19995,804,091'Method of preventing defects and particles produced after tungsten etch back'19985,643,632'Tungsten chemical vapor deposition process for suppression of volcano formation'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997–2001Patents assigned to MOSEL VITELIC INC (9)· patent assignee history
1997–2001Based in Hsinchu, TW· patent location history
1999Based in Hsin Chu, TW· patent location history
2000Based in Luodong Township, TW· patent location history
2000Based in Chia Yi, TW· patent location history
2001Patents assigned to WORLDWIDE SEMICONDUCTOR MFG (1)· patent assignee history
2001–2004Based in Hsinchu County, TW· patent location history
2004Patents assigned to TAIWAN SEMICONDUCTOR MFG (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
MOSEL VITELIC INC91997–2001
TAIWAN SEMICONDUCTOR MFG12004
WORLDWIDE SEMICONDUCTOR MFG12001
Locations
LocationPatentsSpan
Hsinchu, TW41997–2001
Hsinchu County, TW22001–2004
Luodong Township, TW12000
Chia Yi, TW12000
Hsin Chu, TW11999