LexDanaLexDanabeta
Inventor

Günther Seitz

Inventor
Spiegelberg, DE

Overview

2→
Patents
2004–2007
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary
G02BOptical elements, systems or apparatus50%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
PatentTitleYear
7,177,076'8-mirror microlithography projection objective'20076,710,917'8-mirror microlithography projection objective'2004

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2004–2007Patents assigned to ZEISS CARL SMT AG (2)· patent assignee history
2004–2007Based in Spiegelberg, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ZEISS CARL SMT AG22004–2007
Locations
LocationPatentsSpan
Spiegelberg, DE22004–2007