Inventor
Takafumi Niwa
Inventor
Koshi, JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01LSemiconductor devices20%
B05CApparatus for applying fluent materials to surfaces, in general8%
B29CShaping or joining of plastics4%
G11BInformation storage based on relative movement between record carrier and transducer4%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%
Y10TTechnical subjects covered by former us classification4%
PatentTitleYear
10,672,606Coating film forming method, coating film forming apparatus, and storage medium202010,642,168Auxiliary exposure apparatus and exposure amount distribution acquisition method202010,068,763Coating film forming method, coating film forming apparatus, and storage medium20189,972,512Liquid processing method, memory medium and liquid processing apparatus20189,786,488'Liquid processing method, memory medium and liquid processing apparatus'20178,367,308'Substrate processing method'20138,110,325'Substrate treatment method'20125,851,620'Disc metal mold and recorded disc'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998Based in Atsugi, JP· patent location history
2012–2020Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2012–2013Patents assigned to NAKAMURA HIROSHI (2)· patent assignee history
2012–2013Patents assigned to NIWA TAKAFUMI (2)· patent assignee history
2012Patents assigned to KYOUDA HIDEHARU (1)· patent assignee history
2012–2020Based in Koshi, JP· patent location history
2013Patents assigned to KUWAHARA YUHEI (1)· patent assignee history
2013Based in Kumamoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2012–2020 |
| NAKAMURA HIROSHI | 2 | 2012–2013 |
| NIWA TAKAFUMIself | 2 | 2012–2013 |
| KUWAHARA YUHEI | 1 | 2013 |
| KYOUDA HIDEHARU | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Koshi, JP | 6 | 2012–2020 |
| Kumamoto, JP | 1 | 2013 |
| Atsugi, JP | 1 | 1998 |