Inventor
Scott D. Habermehl
Inventor
Corrales, NM, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B81Cprimary
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
B81BMicrostructural devices or systems, e.g. micromechanical devices8%
C23CCoating metallic material8%
C30BSingle-crystal growth8%
G01DMeasuring not specially adapted for a specific variable8%
G01LMeasuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure8%
H01LSemiconductor devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
PatentTitleYear
10,214,415Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture20199,546,420'Methods of depositing an alpha-silicon-carbide-containing film at low temperature'20178,357,994'Antifuse with a single silicon-rich silicon nitride insulating layer'20136,808,952'Process for fabricating a microelectromechanical structure'20046,771,083'Poole-frenkel piezoconductive element and sensor'20046,174,820'Use of silicon oxynitride as a sacrificial material for microelectromechanical devices'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2017Patents assigned to SANDIA CORP (5)· patent assignee history
2001–2019Based in Corrales, NM, US· patent location history
2013Patents assigned to APODACA ROGER T (1)· patent assignee history
2013Patents assigned to HABERMEHL SCOTT D (1)· patent assignee history
2019Patents assigned to NAT TECH & ENG SOLUTIONS SANDIA LLC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SANDIA CORP | 5 | 2001–2017 |
| APODACA ROGER T | 1 | 2013 |
| HABERMEHL SCOTT Dself | 1 | 2013 |
| NAT TECH & ENG SOLUTIONS SANDIA LLC | 1 | 2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Corrales, NM, US | 6 | 2001–2019 |