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Inventor

Li-Shung Chen

Inventor
Hsinchu, TW

Overview

1→
Patents
2005
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
6,864,174'Iteratively selective gas flow control and dynamic database to achieve CD uniformity'2005

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2005Patents assigned to TAIWAN SEMICONDUCTOR MFG (1)· patent assignee history
2005Based in Hsinchu, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG12005
Locations
LocationPatentsSpan
Hsinchu, TW12005