Inventor
Ai-Jen Hung
Inventor
Nantou County, TW
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices44%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
G06FElectric digital data processing11%
H01LSemiconductor devices11%
H10DInorganic electric semiconductor devices11%
PatentTitleYear
10,831,110Lithographic overlay correction and lithographic process20209,805,154'Method of lithography process with inserting scattering bars'20179,733,577'Intra-field process control for lithography'20179,588,446'Calibration apparatus and an adjustment method for a lithography apparatus'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (4)· patent assignee history
2017–2020Based in Nantou County, TW· patent location history
2017Based in Zhushan Township, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 4 | 2017–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nantou County, TW | 3 | 2017–2020 |
| Zhushan Township, TW | 1 | 2017 |