Inventor
Tomonori Umezaki
Inventor
Ube, JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01LSemiconductor devices25%
C07CAcyclic or carbocyclic compounds11%
C09KMaterials for miscellaneous applications, not provided for elsewhere11%
C23CCoating metallic material7%
H10BElectronic memory devices7%
C23FNon-mechanical removal of metallic material from surface4%
C30BSingle-crystal growth4%
H10DInorganic electric semiconductor devices4%
PatentTitleYear
10,151,046Method for producing crystal of silicon carbide, and crystal production device20189,852,914Sacrificial-film removal method and substrate processing device20179,230,821'Dry etching agent and dry etching method using the same'20169,165,776'Dry etching method'20159,093,388'Dry etching agent and dry etching method using the same'20159,082,725'Pattern forming method'20159,017,571'Dry etching agent and dry etching method'20158,562,751'Dry cleaning method of substrate processing apparatus'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2018Patents assigned to CENTRAL GLASS CO LTD (8)· patent assignee history
2013–2015Patents assigned to UMEZAKI TOMONORI (5)· patent assignee history
2013–2015Patents assigned to MORI ISAMU (4)· patent assignee history
2013–2018Based in Ube, JP· patent location history
2015Patents assigned to KIKUCHI AKIOU (3)· patent assignee history
2015Patents assigned to HIBINO YASUO (2)· patent assignee history
2015–2017Based in Yamaguchi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CENTRAL GLASS CO LTD | 8 | 2013–2018 |
| UMEZAKI TOMONORIself | 5 | 2013–2015 |
| MORI ISAMU | 4 | 2013–2015 |
| KIKUCHI AKIOU | 3 | 2015 |
| HIBINO YASUO | 2 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Ube, JP | 6 | 2013–2018 |
| Yamaguchi, JP | 2 | 2015–2017 |