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Inventor

Dah-Chung Oweyang

Inventor
Hsinchu County, TW

Overview

1→
Patents
2008
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
7,341,939'Method for patterning micro features by using developable bottom anti-reflection coating'2008

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2008Patents assigned to TAIWAN SEMICONDUCTOR MAUNFACTU (1)· patent assignee history
2008Based in Hsinchu County, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MAUNFACTU12008
Locations
LocationPatentsSpan
Hsinchu County, TW12008