Inventor
Sang-Yong Yu
Inventor
Hwaseong-si, KR
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices19%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
F03GSpring, weight, inertia or like motors6%
G01BMeasuring length, thickness or similar linear dimensions6%
G02BOptical elements, systems or apparatus6%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them6%
G06FElectric digital data processing6%
G06TImage data processing or generation, in general6%
G09GArrangements or circuits for control of indicating devices using static means to present variable information6%
H01JElectric discharge tubes or discharge lamps6%
PatentTitleYear
11,125,920Optical system20219,229,327'Electron beam exposure apparatus and method of detecting error using the same'20168,304,173'Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor device'20127,369,254'System and method for measuring dimension of patterns formed on photomask'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2016Patents assigned to SAMSUNG ELECTRONICS CO LTD (3)· patent assignee history
2008Based in Yongin-si, KR· patent location history
2012Patents assigned to KIM SUNG-HYUCK (1)· patent assignee history
2012Patents assigned to YOON GI-SUNG (1)· patent assignee history
2012Patents assigned to YU SANG-YONG (1)· patent assignee history
2012–2016Based in Hwaseong-si, KR· patent location history
2021Patents assigned to TDK TAIWAN CORP (1)· patent assignee history
2021Based in Taoyuan, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 3 | 2008–2016 |
| KIM SUNG-HYUCK | 1 | 2012 |
| TDK TAIWAN CORP | 1 | 2021 |
| YOON GI-SUNG | 1 | 2012 |
| YU SANG-YONGself | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hwaseong-si, KR | 2 | 2012–2016 |
| Taoyuan, TW | 1 | 2021 |
| Yongin-si, KR | 1 | 2008 |