Inventor
Akihito Toda
Inventor
Yamanashi, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
H01JElectric discharge tubes or discharge lamps18%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests18%
B29DProducing particular articles from plastics or from substances in a plastic state9%
G02BOptical elements, systems or apparatus9%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices9%
PatentTitleYear
8,058,585'Plasma processing method, plasma processing apparatus and storage medium'20117,297,635'Processing method'20076,299,722'Etching equipment including a post processing apparatus for removing a resist film, polymer, and impurity layer from an object'20015,858,878'Semiconductor wafer etching method and post-etching process'19995,385,624'Apparatus and method for treating substrates'19955,147,493'Plasma generating apparatus'1992Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1992–2011Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
1992Patents assigned to TEL YAMANISHI KK (1)· patent assignee history
1992–2001Based in Yamanashi, JP· patent location history
2007–2011Based in Nirasaki, JP· patent location history
2011Patents assigned to AMEMIYA HIROKI (1)· patent assignee history
2011Patents assigned to NAGAHATA HIROSHI (1)· patent assignee history
2011Patents assigned to TODA AKIHITO (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 6 | 1992–2011 |
| AMEMIYA HIROKI | 1 | 2011 |
| NAGAHATA HIROSHI | 1 | 2011 |
| TEL YAMANISHI KK | 1 | 1992 |
| TODA AKIHITOself | 1 | 2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yamanashi, JP | 4 | 1992–2001 |
| Nirasaki, JP | 2 | 2007–2011 |